Temperature sensor for wafer tool

Wed, 03 Jun 2026 12:23:02 +0800

On the line, that 300 mm wafer is sitting, waiting for the soft bake that sets your linewidth control. A 2°C hiccup in the hotplate profile? That’s enough to move critical dimension by over 1 nm, and every cycle that drifts is another lot headed for the scrap pile. We built our wafer tool temperature sensor for exactly this environment, where thermal budget isn’t a suggestion—it’s a hard boundary. What matters under the hood You get ±0.1°C stability across the full bake window, 200–250°C, with calibration traceable to NIST. The response time is under 150 ms, so closed-loop control can catch setpoint shifts before the photoresist starts drifting. The probe body is quartz and stainless, sealed with a low-outgassing epoxy, and it plays clean in Class 1–100 spaces with particle generation held below 0.1 particle/cm². Output comes as 4–20 mA with RS-485 and Modbus RTU, and the 1/4-20 threaded mount drops straight into standard wafer tool hotplates—no adapter plates needed. Here’s why it holds up in the fab. Photoresist processing doesn’t forgive sloppy thermal control. Soft bake drives out solvent and sets film stress; hard bake locks the image before etch. With this sensor, you keep uniformity across the wafer and repeatability from lot to lot, so CD mean and standard deviation stay in spec. The payoff is fewer reworks, stable yield, and maintenance intervals you can plan around. You also save energy, because tight control prevents overshoot and compensates for line voltage swings without overheating. A few practical notes before you roll it out. Run a grounded, shielded cable and keep the sensor isolated from EMI near plasma chambers. Plan on a 2-point field calibration at the tool, using your own reference thermocouple, to dial in the absolute reading. In high-humidity areas, condensation can form on the probe—add the nitrogen purge fitting. Bottom line: when temperature is measured clean and measured right, the process stays in control.

Tool on Top-Rated Quartz IR Lamps

Temperature sensor for wafer tool